Offensively, Sam Ellis had a career game with four goals and two assists. Erin McMunn (Winters Mill) also had a six-point game with three goals and three assists. Jaci Gassaway (Severna Park) reached a milestone, scoring her 100th career goal.
The Tigers (10-5) started with a 4-0 run, of which Ellis had two. Princeton would never relinquish the lead and led by as many as six goals. The Nittany Lions (11-5) could get within only two. Penn State's scoring leaders each had three points: Kelly Lechner (three goals) and Maggie McCormick (one goal, two assists).
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Second-seeded Princeton will face third-seeded Dartmouth in Friday's Ivy League semifinal at 4 p.m.
Erin Fitzgerald scored a game-high four goals and Kelly Rich added three for Northwestern, which scored the most goals since a 16-3 decision over Harvard on March 16.
After taking a 6-3 lead into halftime, Northwestern led by as many as six goals after opening the second half on a 4-1 run. But Penn, which entered the game having won nine of its past 10 outings, hung tough and eventually pulled to within three with 13:26 to play.
Northwestern next faces the winner of No.6 Penn State/Vanderbilt on Thursday in Friday's American Lacrosse Conference semifinal at 4:30 p.m. in Baltimore.
No. 10 Notre Dame 14, Marquette 5: Betsy Mastropieri scored four goals, Jenny Granger had five points (one goal, four assists) and Jamie Morrison had a hat trick to power the host Fighting Irish past the Golden Eagles (2-15).
Marquette, in its first season of lacrosse, trailed 3-1 after 20 minutes. Notre Dame's speed and depth took over from there during a 6-0 run with two goals by Morrison.
Stanford led for most of the first half until California used a 5-0 run to close out the half with a 9-7 advantage. Kim Anna (River Hill) finished with a game-high four goals for the Cardinal.
Salisbury 16, St. Mary's 4: Lauren Feusahrens had a game-high five goals and the host Sea Gulls (17-0) took another step to their 11th conference title.
The Sea Gulls host York, a 12-5 winner over Mary Washington, in the Capital Athletic Conference championship game Saturday.
Stevenson 17, Lycoming 6: The visiting Mustangs (15-1, 8-0 Commonwealth Conference) have won 15 straight.
Washington College 13, McDaniel 6: Corinne Ziccardi (Loch Raven) scored four goals to lead the Shorewomen (13-4, 6-4 Centennial Conference) past the Green Terror (9-8, 5-5).
Washington College broke open a 5-4 halftime lead by scoring the first seven goals of the second half. The two teams will do it again Wednesday at 7 p.m. in the conference tournament opener.
Susquehanna 15, Goucher 7: Erin Reifsnyder put the host Gophers (7-9, 0-4 Landmark Conference) up 6-5 late in the second half, but the Crusaders (15-0, 4-0) scored the next eight goals to take control.
Immaculata 16, Notre Dame (Md.) 4: The host Mighty Macs (11-6, 5-3) scored three goals in the first 1:07 and never looked back in the quarterfinals of the Colonial States Athletic Conference tournament.
Widener 17, Hood 1: The visiting Blazers (3-12, 0-8 Commonwealth Conference) finished their season on a nine-game losing streak.
The Pioneers (8-8, 3-5) opened with an 8-0 run. Brigid Ayer scored Hood's lone goal unassisted with 12:12 left in the first half.